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投稿时间:2015-04-15 修订日期:2015-05-18
投稿时间:2015-04-15 修订日期:2015-05-18
中文摘要: 运用电子背散射衍射(EBSD)技术,对通过优化真空熔炼工艺制备的高纯金溅射靶材不同区域的微观组织、晶界取向差和织构组分进行了研究。结果表明:高纯金靶材组织由细小的等轴晶组成,平均晶粒尺寸为206nm,样品在轧制过程中发生了再结晶,样品所测得的织构(110)平行于轧面,轧向不确定,为较弱的织构。EBSD技术相较其他分析技术,具有快速高效的定量统计材料的微观组织结构、织构、晶粒尺寸、取向差的特征,是高纯金靶材微观组织的一种有效分析手段。
Abstract:S By using electron backscatter diffraction (EBSD) technology, the microstructure of different regions, grain boundary orientation and texture components of high purity gold sputtering target prepared by optimizing vacuum melting are studied. The results show that the tissue high of purity gold target is composed of fine equiaxed grains, and the average grain size is 206nm, sample recrystallization occurred during the rolling process, the measured sample texture (110) parallel to the rolling surface, the rolling orientation is uncertain, and it’s weaker texture. This study show that EBSD technique compared to other analytical techniques is characteristic of fast and efficient quantitative statistical for texture, grain size and orientation difference, therefore, it’s a highly effective analysis tools for gold target microstructure.
keywords: high-purity gold sputtering target electron backscatter diffraction misorientation texture
文章编号: 中图分类号:TG115.23 文献标志码:
基金项目:
作者 | 单位 | |
朱勇* | 贵研铂业股份有限公司 | salmontoby@126.com |
阳岸恒 | 贵研铂业股份有限公司 | |
张济祥 | 贵研铂业股份有限公司 | |
谢宏潮 | 贵研铂业股份有限公司 | |
卢绍平 | 贵研铂业股份有限公司 |
引用文本:
朱勇,阳岸恒,张济祥,谢宏潮,卢绍平.高纯金溅射靶材的微观组织与织构的EBSD研究[J].有色金属工程,2016,6(1):.
朱勇,阳岸恒,张济祥,谢宏潮,卢绍平.高纯金溅射靶材的微观组织与织构的EBSD研究[J].有色金属工程,2016,6(1):.