Abstract:S By using electron backscatter diffraction (EBSD) technology, the microstructure of different regions, grain boundary orientation and texture components of high purity gold sputtering target prepared by optimizing vacuum melting are studied. The results show that the tissue high of purity gold target is composed of fine equiaxed grains, and the average grain size is 206nm, sample recrystallization occurred during the rolling process, the measured sample texture (110) parallel to the rolling surface, the rolling orientation is uncertain, and it’s weaker texture. This study show that EBSD technique compared to other analytical techniques is characteristic of fast and efficient quantitative statistical for texture, grain size and orientation difference, therefore, it’s a highly effective analysis tools for gold target microstructure.