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投稿时间:2019-04-22 修订日期:2019-09-09
投稿时间:2019-04-22 修订日期:2019-09-09
中文摘要: 本文主要研究了以晶体硅的金刚线切割废料为原料制备高纯硅。首先利用X射线荧光光谱仪、X射线衍射仪、激光粒度仪、扫描电镜以及化学分析方法对原料的性质进行了研究。结果表明:切割废料中主要化学组成元素是Si,同时含少量金属杂质元素如Al、Na、Ca和Fe等;主要物相是单质硅;平均粒径为1.17 μm;微观形貌为片状且高度聚合;其中硅百分含量为83.99%,二氧化硅百分含量为13.5%,其他杂质百分含量为2.51%。然后将切割废料制球并置于常压感应炉内进行熔炼,产物硅纯度约为99.61%,出硅率为60.32%。结果表明采用常压感应熔炼的方式可以实现晶体硅切割废料的有效回收利用。
Abstract:In this paper, silicon diamond-wire saw cutting waste was used to prepare high-purity silicon. Firstly, the characterization of the cutting waste were analyzed by X-ray fluorescence spectrometer、X-ray diffractometer、Laser particle analyzer、Scanning electron microscope and Chemical analysis method. The results show that the main chemical element is Si, and contain small amounts of metallic impurities such as Al, Na, Ca and Fe; The main phase is silicon; The average particle size of 1.17 μm; The microstructure is patch and highly polymerization; The content of each composition is 82.53 wt% Si, 13.91 wt% SiO2, 3.56 wt% others. Then, the micro silicon powder waste was pelletized and then melted in induction furnace in atmosphere. Silicon ingot with 99.61% was prepared and the recovery rate was 60.32%. The results indicate that it is prospective to retrieve the silicon powder from diamond-wire cutting slurry waste by induction melting in atmosphere.
文章编号:YSJSGC20190184 中图分类号: 文献标志码:
基金项目:国家重点基础研究发展计划(973计划)
Author Name | Affiliation | Postcode |
mengfanxing | Northeastern University | 110004 |
xingpengfei | Northeastern University | 110004 |
niedan | Northeastern University | 110004 |
wangxiaofeng | Northeastern University | 110004 |
duxinghong | Northeastern University | 110004 |
qiuzhi | Northeastern University | 110004 |
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